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TGQ1
Product Description
Calibration grating TGQ1 is intended for
- simultaneous calibration in X, Y and Z directions;
- scanner lateral calibration;
- detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.
Step height is the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated wih help of PTB certified grating TGZ1. Basic step height can vary from the specified one within ±15% depending on the batch (for example step height can be 23±1.5 nm).
AFM image of TGQ1 grating.
General Features
| Structure |
step - SiO2, bottom - Si |
| Pattern type |
3-Dimensional array of rectangulars |
| Period |
3±0,05 µm |
| Height |
20±1.5 nm* |
| Rectangles side size |
1,5±0,35 µm |
| Chip size |
5x5x0,5 mm |
| Effective area |
central square 3x3 mm |
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