TGL1

Calibration grating TGL1 for 2-D and 3-D calibration with three different periods - 6um,10um, 20um. 
Step height 168nm.

Each grating has 9 different parts with 3 different structures.
Areas 1, 6, 7 - Lineas.
Areas 2, 5, 8 - Pillars.
Areas 3, 4, 9 - Circles.

AFM images of all grating parts

Areas with 6um X/Y period

Areas with 10um X/Y period

Areas with 20um X/Y period