TGS2

Grating set TGS2 consists of 6 calibration gratings: TGZ1, TGZ2, TGZ3, TGT1, TGG1, TGX1.

Grating set TGS2 can be used for:

• AFM calibration in X, Y and Z directions;
• lateral and vertical calibration;
• detection of lateral non-linearity;
• detection of hysteresis, creep, and cross-coupling effects;
• detection of angular distortion;
• for 3-D visualization of the scanning tip;
• determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.

Click on the grating name below to see detailed specification.
 
TGZ1 - for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
TGZ2 - for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
TGZ3 - for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements
TGX1 - for lateral scanner calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip sharpness.
TGG1 - for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, tip sharpness characterization.
TGT1 - for tip shape and sharpness estimation, for image deconvolution and contamination control.