TGS1

Grating set TGS1 consists of 3 calibration gratings: TGZ1, TGZ2, TGZ3 nad intended for  Z and X (or Y) calibration and nonlinearity measurements.

Click on the grating name below to see detailed specification.
 
TGZ1 - for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
TGZ2 - for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
TGZ3 - for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements.