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TGX1
TGX1 TGX1

TGX1

TGX1 €200 €160 +
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Product Description

Calibration grating TGX1 is intended for
  • lateral calibration of AFM scanners
  •  detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
  • determination of the tip sharpness.
TGX_pic.gif
TGX1_6.jpg
                       AFM image of TGX1 grating.

General Features

Structure Si
Pattern type chessboard-like array of square pillars with sharp undercut edges
Period 3±0,05 µm
Height ~ 0,6 µm
Chip size 5x5x0,5 mm
Effective area central square 3x3 mm
Edge curvature radius less then 10nm
 

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