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TGT1
Product Description
Calibration grating TGT1 is intended for
- tip shape and sharpness estimation and further using in deconvolution program;
- tip degradation and contamination control.
SEM image of TGT1 grating
General Features
| Structure |
the grating is formed on Si wafer top surface |
| Pattern type |
3-D array of sharp tips |
| Period |
3±0,05 µm |
| Height |
0.3 - 0.5µm |
| Chip size |
5x5x0,5 mm |
| Effective area |
central square 2x2 mm |
| Tip angle |
50±10 degrees (on the very tip end) |
| Tip curvature radius |
≤10nm |
| Diagonal period |
2,12 µm |
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