TGL1Product Description
Calibration grating TGL1 for 2-D and 3-D calibration with three different periods - 6um,10um, 20um.
Step height 168nm. Each grating has 9 different parts with 3 different structures. Areas 1, 6, 7 - Lineas. Areas 2, 5, 8 - Pillars. Areas 3, 4, 9 - Circles. ![]() AFM images of all grating partsAreas with 6um X/Y period![]() Areas with 10um X/Y period![]() Areas with 20um X/Y period![]() General Features
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