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TGG1
TGG1 TGG1 TGG1

TGG1

TGG1 €200 +
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Product Description

Calibration grating TGG1 is intended for
  • AFM calibration in X or Y axis;
  • detection of lateral and vertical scanner nonlinearity;
  • detection of angular distortion;
  • tip characterization.
TGG_pic.gif

tgg1.jpg
                       AFM image of TGG1 grating.

General Features

Structure Si
Pattern type 1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes
Period 3±0,05 µm
Chip size 5x5x0,5 mm
Effective area central square 3x3 mm
Edge angle 70 degrees
Edge radius ≤10nm
 

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