TGZ4

Calibration grating TGZ4 for Z-axis calibration (step height 1517±20nm) and nonlinearity measurements.



Step height is the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated wih help of PTB certified grating TGZ1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ4 grating can have step height 1600±20 nm).

AFM image of TGZ2 grating (step height 110nm).