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Main page > Catalog > Calibration > Calibration Gratings > TGG1

TGG1

€200

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Product Description

Calibration grating TGG1 is intended for

AFM calibration in X or Y axis;
detection of lateral and vertical scanner nonlinearity;
detection of angular distortion;
tip characterization.

AFM image of TGG1 grating.

General Features

Structure	Si
Pattern type	1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes
Period	3±0,05 µm
Chip size	5x5x0,5 mm
Effective area	central square 3x3 mm
Edge angle	70 degrees
Edge radius	≤10nm