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Set of 15 cantilevers
€300 +
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Set of 50 cantilevers
€820 +
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Product Description

High Resolution High Resonant Frequency AFM Cantilevers HA_HR/Au series are designed for Semicontact ( Intermittent ), Noncontact and electrical applications (SKM, SCM, SRIM, EFM, LAO Lithography). Each probe has 2 rectangular cantilevers.Typical Resonant Frequency 380kHz / 230kHz (dispersion ±10%), Typical Force Constant 34N/m / 17N/m (dispersion ±20%). Cantilever has Au tip and reflective side coatings. Probes are also available without tip coating.

Probes are packed in boxes with 15 and 50 pieces. Amount discount is included in the package price.

High Accuracy composite ETALON probes combine the main features allowing to obtain high quality AFM images:
• Sharp tip - curvature radius < 10 nm.
• Resonance frequency, specified with high accuracy - ±10% within a wafer.
• Special chip geometry with vertical sidewalls for convenient operating.
• High aspect ratio tip.
• Enhanced back-side reflection of the cantilever.
• Cost effective price.

General Features

Material Polysilicon cantilever, silicon tip
Chip size 3.6x1.6x0.4mm
Reflective side coating Au
Tip coating Au
Tip curvature radius < 35nm
Available tip coatings Pt, W2C

Special Features

Cantilever series Cantilever Cantilever length, L±2µm Cantilever width, W±3µm Cantilever thickness, T±0.15µm Resonant frequency, kHz Force constant, N/m
min typical max min typical max
HA_HR/Au A 93 34 3.0 342 380 418 27 34 41
B 123 34 3.0 207 230 253 13 17 21

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