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TGS_Cert TGS_Cert TGS_Cert TGS_Cert TGS_Cert TGS_Cert


TGS_Cert €3,865 +
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Product Description

Grating set TGS_Cert consists of 7 calibration gratings: TGZ1, TGZ2, TGZ3, TGT1, TGQ1, TGG1, TDG01.

Grating set TGS_Cert can be used for:
  • SPM simultaneuos calibration in X, Y and Z directions;
  • submicron SPM calibration in X or Y direction;
  • lateral and vertical calibration;
  • detection of lateral non-linearity;
  • detection of hysteresis, creep, and cross-coupling effects;
  • detection of angular distortion;
  • for 3-D visualization of the scanning tip;
  • determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
Click on the grating name below to see detailed specification.
TGZ1 - for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
TGZ2 - for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
TGZ3 - for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements
TGG1 - for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, tip sharpness characterization.
TGT1 - for tip shape and sharpness estimation, for image deconvolution and contamination control.
TGQ1 - for simultenious calibration in X,Y,Z directions. Step height 20±1.5nm.
TDG01 - for AFM submicron calibration in the X or Y direction. Period is 278nm.

Calibration gratings (TGZ1, TGZ2, TGZ3, TGT1, TGG1, TGQ1, TDG01) are added to the state register in November 2009.
Certificates were prolonged in November 2015.

Grating registration numbers:

41676-09                TDG01

41677-09                TGG1

41678-09                TGZ1,2,3

41679-09                TGT1

41680-09                TGQ1

Gratings verification and calibration are made by The Russain Research Institute of Metrological Service (VNIIMS). VNIIMS calibration possibilities are confirmed by PTB, Coomet (EURO-ASIAN COOPERATION OF NATIONAL METROLOGICAL INSTITUTIONS ), BIMP (Bureau International des Poids et Mesures) and other organizations.

General Features

Structure step - SiO2, bottom - Si
Pattern type 2 - Dimensional
Period 3±0,05 µm
Chip size 5x5x0,5 mm
Effective area central square 3x3 mm

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