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Set of 15 cantilevers
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Product Description

High Aspect Ratio Premium Etalon tips PHA_NC series, each chip has 2 cantilevers, resonant frequency 235 kHz / 140 kHz, force constant 12 N/m / 3.5 N/m, with Au reflective coating.

Premium ETALON tips have conical apex and cylindrical body to minimize tip-related widening of objects investigated. Excellent geometry provides high resolution of AFM scans:
  • Conical apex of 5-8 nm typical curvature radius and cone angle < 30° suits well for imaging of small objects and nanoparticles;
  • Narrow cylindrical body with diameter of 300 - 700 nm allows getting detailed images of high objects, making Etalon Premium probes being similar to high aspect ratio probes’ models.

High Accuracy composite ETALON probes combine the main features allowing to obtain high quality AFM images: 

• Sharp tip - curvature radius < 10 nm. 
• Resonance frequency, specified with high accuracy - ±10% within a wafer. 
• Special chip geometry with vertical sidewalls for convenient operating. 
• High aspect ratio tip. 
• Enhanced back-side reflection of the cantilever. 
• Cost effective price. 

Specification of PHA_NC probe series: 

 Material  Polysilicon lever,
 monocrystal silicon tip
 Chip size  3.6 x 1.6 x 0.4 mm
 Reflective side  Au
 Cantilever number  2 rectangular
 Tip shape Cylindrical at the base, conic on the last 1000 nm
 Tip cone angle φ  30 degrees on the last 1000nm
 Full tip height  ≥ 8 µm
 Pedestal/tip ratio  1:1
 Tip curvature radius  less than 10nm (5-8 nm typically)

General Features

Material Polysilicon cantilever, silicon tip
Chip size 3.6x1.6x0.4mm
Reflective side coating Au
Tip coating No
Tip curvature radius < 10nm

Special Features

Cantilever series Cantilever Cantilever length, L±2µm Cantilever width, W±3µm Cantilever thickness, T±0.15µm Resonant frequency, kHz Force constant, N/m
min typical max min typical max
PHA_NC A 94 34 1.85 210 235 260 9 12 15
B 124 34 1.85 125 140 155 2.5 3.5 4.5

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