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TGZ1
TGZ1 TGZ1 TGZ1

TGZ1

TGZ1 €100 +
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Product Description

Calibration grating TGZ1 for Z-axis calibration (step height 20,0±1.5nm) and nonlinearity measurements.

TGS1_pic.jpg

Step height is the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated wih help of PTB certified grating TGZ1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm).
TGZ2_6.jpg
AFM image of TGZ1 grating (step height 20nm).

General Features

Structure step - SiO2, bottom - Si
Pattern type 2-Dimensional
Period 3±0,05 µm
Height 20,0±1.5 nm*
Chip size 5x5x0,5 mm
Effective area central square 3x3 mm
 

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