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TGT1
TGT1 TGT1 TGT1 TGT1 TGT1

TGT1

TGT1 €300 +
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Product Description

Calibration grating TGT1 is intended for
  • tip shape and sharpness estimation and further using in deconvolution program;
  • tip degradation and contamination control.
tgt1.jpg
SEM image of TGT1 grating

General Features

Structure the grating is formed on Si wafer top surface
Pattern type 3-D array of sharp tips
Period 3±0,05 µm
Height 0.3 - 0.5µm
Chip size 5x5x0,5 mm
Effective area central square 2x2 mm
Tip angle 50±10 degrees (on the very tip end)
Tip curvature radius ≤10nm
Diagonal period 2,12 µm
 

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